LexDanaLexDanabeta
Inventor

Yasuhiko Nishinakayama

Inventor
Nirasaki, JP

Overview

2→
Patents
2003–2010
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
G05BControl or regulating systems in general20%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests20%
PatentTitleYear
7,672,502'Substrate positioning device, substrate positioning method and program'20106,510,365'Carrier system positioning method'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2010Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2003–2010Based in Nirasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22003–2010
Locations
LocationPatentsSpan
Nirasaki, JP22003–2010