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Inventor

Evangelia Tegou

Inventor
Athens, GR

Overview

1→
Patents
2001
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
6,296,989'Silylation of epoxy-containing photoresist films'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to NAT CT SCIENT RES DEMOKRITOS (1)· patent assignee history
2001Based in Athens, GR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NAT CT SCIENT RES DEMOKRITOS12001
Locations
LocationPatentsSpan
Athens, GR12001