LexDanaLexDanabeta
Inventor

BYUNG-KWON CHO

Inventor
KR

Overview

2→
Patents
2022–2024
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
B08BCleaning in general20%
PatentTitleYear
11,887,868Substrate processing apparatus and apparatus for manufacturing integrated circuit device202411,302,526Supercritical drying apparatus and method of drying substrate using the same2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2024Patents assigned to SAMSUNG ELECTRONICS CO LTD (2)· patent assignee history
2022–2024Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD22022–2024
Locations
LocationPatentsSpan
KR22022–2024