Inventor
Wilhelm Egle
Inventor
Aalen, DE
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B82Yprimary
B82YSpecific uses or applications of nanostructures26%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices26%
G21KHandling of particles or ionising radiation not otherwise provided for21%
G02BOptical elements, systems or apparatus18%
H01JElectric discharge tubes or discharge lamps9%
PatentTitleYear
7,965,456'Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component'20117,483,223'Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component'20097,460,212'Collector configured of mirror shells'20087,410,265'Focusing-device for the radiation from a light source'20087,321,126'Collector with fastening devices for fastening mirror shells'20087,244,954'Collector having unused region for illumination systems using a wavelength ≦193 nm'20077,091,505'Collector with fastening devices for fastening mirror shells'20067,015,489'Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm'20066,927,403'Illumination system that suppresses debris from a light source'20054,812,652'Imaging method and apparatus for electron microscopes'19894,396,861'High voltage lead-through'19834,194,116'Electron microscope or the like and method of use'1980Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1980–1989Patents assigned to ZEISS STIFTUNG (3)· patent assignee history
1980–1983Based in Konigsbronn, DE· patent location history
1989–2011Based in Aalen, DE· patent location history
2005Patents assigned to ASML LITHOGRAPHY B V (1)· patent assignee history
2006–2009Patents assigned to ZEISS CARL SMT AG (7)· patent assignee history
2011Patents assigned to ZEISS CARL SMT GMBH (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT AG | 7 | 2006–2009 |
| ZEISS STIFTUNG | 3 | 1980–1989 |
| ASML LITHOGRAPHY B V | 1 | 2005 |
| ZEISS CARL SMT GMBH | 1 | 2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 10 | 1989–2011 |
| Konigsbronn, DE | 2 | 1980–1983 |