Inventor
Masahiko Harumoto
Inventor
Kyoto, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
H01LSemiconductor devices23%
C23CCoating metallic material15%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1015%
PatentTitleYear
11,004,702Film processing unit and substrate processing apparatus202110,955,745Exposure device, substrate processing apparatus, exposure method and substrate processing method202110,941,492Substrate treating method202110,900,126Substrate treating method and apparatus used therefor2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021Patents assigned to SCREEN HOLDINGS CO LTD (4)· patent assignee history
2021Based in Kyoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 4 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 4 | 2021 |