LexDanaLexDanabeta
Inventor

Masanori Nunami

Inventor
Suita, JP

Overview

2→
Patents
2011–2013
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H05GX-ray technique50%
PatentTitleYear
8,354,657'Extreme ultra violet light source apparatus'20137,928,418'Extreme ultra violet light source apparatus'2011

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2011–2013Patents assigned to UNIV OSAKA (2)· patent assignee history
2011Patents assigned to GIGAHOTON INC (1)· patent assignee history
2011–2013Based in Suita, JP· patent location history
2013Patents assigned to GIGAPHOTON INC (1)· patent assignee history
2013Patents assigned to KANG YOUNG GWANG (1)· patent assignee history
2013Patents assigned to KOMORI HIROSHI (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
UNIV OSAKA22011–2013
GIGAHOTON INC12011
GIGAPHOTON INC12013
KANG YOUNG GWANG12013
KOMORI HIROSHI12013
Locations
LocationPatentsSpan
Suita, JP22011–2013