Inventor
Shang-Chieh Chien
Inventor
New Taipei, TW
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
H05GX-ray technique32%
G21KHandling of particles or ionising radiation not otherwise provided for8%
G02BOptical elements, systems or apparatus4%
G06FElectric digital data processing4%
H01LSemiconductor devices4%
H05HPlasma technique4%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h104%
PatentTitleYear
11,013,097Apparatus and method for generating extreme ultraviolet radiation202110,990,026Lithography apparatus and cleaning method thereof202110,993,308Light source for lithography exposure process202110,976,672System and method for performing lithography process in semiconductor device fabrication202110,969,690Extreme ultraviolet control system for adjusting droplet illumination parameters202110,955,750Lithography system and method thereof202110,955,752EUV radiation source apparatus for lithography202110,955,762Radiation source apparatus and method for decreasing debris in radiation source apparatus202110,942,459Lithography system and cleaning method thereof202110,928,741Radiation source for lithography process202110,925,142EUV radiation source for lithography exposure process20216,704,852'Control device applicable to flash memory card and method for building partial lookup table'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004Based in Hsinchu, TW· patent location history
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (11)· patent assignee history
2021Patents assigned to CHEN LI JUI (1)· patent assignee history
2021Patents assigned to CHEN YU CHIH (1)· patent assignee history
2021Patents assigned to CHENG PO CHUNG (1)· patent assignee history
2021Patents assigned to CHIEN SHANG CHIEH (1)· patent assignee history
2021Based in New Taipei, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 11 | 2021 |
| CHEN LI JUI | 1 | 2021 |
| CHEN YU CHIH | 1 | 2021 |
| CHENG PO CHUNG | 1 | 2021 |
| CHIEN SHANG CHIEHself | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| New Taipei, TW | 11 | 2021 |
| Hsinchu, TW | 1 | 2004 |