Inventor
Kohichi Orito
Inventor
Iwate, JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
C03CChemical composition of glasses, glazes or vitreous enamels8%
H01LSemiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
9,580,802'Film formation method and apparatus for semiconductor process'20179,416,448'Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method'20168,746,170'Substrate process apparatus, substrate process method, and computer readable storage medium'20148,721,790'Film deposition apparatus'20148,298,341'Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2017Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2012–2016Patents assigned to ORITO KOHICHI (4)· patent assignee history
2012Patents assigned to CHIBA TAKASHI (1)· patent assignee history
2012–2016Based in Oshu, JP· patent location history
2014–2016Patents assigned to HONMA MANABU (3)· patent assignee history
2014–2016Patents assigned to KATO HITOSHI (2)· patent assignee history
2014–2017Based in Iwate, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2012–2017 |
| ORITO KOHICHIself | 4 | 2012–2016 |
| HONMA MANABU | 3 | 2014–2016 |
| KATO HITOSHI | 2 | 2014–2016 |
| CHIBA TAKASHI | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Iwate, JP | 3 | 2014–2017 |
| Oshu, JP | 2 | 2012–2016 |