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Inventor

Takurou Ushida

Inventor
Toyama, JP

Overview

1→
Patents
2017
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
9,816,182'Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium'2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017Patents assigned to HITACHI INT ELECTRIC INC (1)· patent assignee history
2017Based in Toyama, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI INT ELECTRIC INC12017
Locations
LocationPatentsSpan
Toyama, JP12017