Inventor
Hsueh-Yi Chung
Inventor
Hsinchu County, TW
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices36%
H01LSemiconductor devices21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
G06FElectric digital data processing14%
B23KSoldering or unsoldering7%
PatentTitleYear
11,003,091Method of fabricating reticle202110,534,272Method of fabricating reticle202010,073,354Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool20189,908,201'Systems and methods for edge bead removal'20188,683,395'Method and system for feed-forward advanced process control'20148,429,569'Method and system for feed-forward advanced process control'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2014Patents assigned to TAIWAN SEMICONDUCTOR MFG (2)· patent assignee history
2013Patents assigned to CHANG KEH-WEN (1)· patent assignee history
2013Patents assigned to CHUNG HSUEH-YI (1)· patent assignee history
2013Patents assigned to LIN CHUN-HUNG (1)· patent assignee history
2013–2018Based in Zhubei City, TW· patent location history
2018–2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (4)· patent assignee history
2018–2021Based in Hsinchu County, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 4 | 2018–2021 |
| TAIWAN SEMICONDUCTOR MFG | 2 | 2013–2014 |
| CHANG KEH-WEN | 1 | 2013 |
| CHUNG HSUEH-YIself | 1 | 2013 |
| LIN CHUN-HUNG | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu County, TW | 3 | 2018–2021 |
| Zhubei City, TW | 3 | 2013–2018 |