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Inventor

Henricus Martinus Johannes Van De Groes

Inventor
Tiel, NL

Overview

4→
Patents
2016–2020
Patent span
Physics
Primary field (CPC G)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
G01NInvestigating or analysing materials by determining their chemical or physical properties29%
G02BOptical elements, systems or apparatus14%
H01JElectric discharge tubes or discharge lamps14%
PatentTitleYear
10,867,770E-beam apparatus202010,809,634Stage system and metrology tool202010,416,567Illumination system and metrology system20199,383,659'Positioning system, lithographic apparatus and device manufacturing method'2016

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2016–2020Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2016–2020Based in Tiel, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV42016–2020
Locations
LocationPatentsSpan
Tiel, NL42016–2020