Inventor
Paul F. Grosshart
Inventor
Billerica, MA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
C23CCoating metallic material17%
F16KValves8%
F24FAir-conditioning8%
G05BControl or regulating systems in general8%
G05DSystems for controlling or regulating non-electric variables8%
H01JElectric discharge tubes or discharge lamps8%
H02NElectric machines not otherwise provided for8%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
10,119,712Room condition monitoring system20186,631,334'Pressure-based mass flow controller system'20036,349,744'Manifold for modular gas box system'20025,968,594'Direct liquid injection of liquid ammonia solutions in chemical vapor deposition'19995,948,283'Method and apparatus for enhancing outcome uniformity of direct-plasma processes'19995,737,175'Bias-tracking D.C. power circuit for an electrostatic chuck'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–1999Patents assigned to LAM RES CORP (3)· patent assignee history
1998–2002Based in Billerica, MA, US· patent location history
2002–2003Patents assigned to MKS INSTR INC (2)· patent assignee history
2003Based in Hanson, MA, US· patent location history
2018Patents assigned to SETRA SYSTEMS (1)· patent assignee history
2018Patents assigned to SETRA SYSTEMS INC (1)· patent assignee history
2018Based in Bedford, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 3 | 1998–1999 |
| MKS INSTR INC | 2 | 2002–2003 |
| SETRA SYSTEMS | 1 | 2018 |
| SETRA SYSTEMS INC | 1 | 2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Billerica, Massachusetts, US | 4 | 1998–2002 |
| Bedford, Massachusetts, US | 1 | 2018 |
| Hanson, Massachusetts, US | 1 | 2003 |