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Inventor

Yasushi Migita

Inventor
Kirishima, JP

Overview

5→
Patents
2003–2013
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1042%
C23CCoating metallic material17%
H02NElectric machines not otherwise provided for17%
Y10TTechnical subjects covered by former us classification17%
H01JElectric discharge tubes or discharge lamps8%
PatentTitleYear
8,503,155'Wafer support member, method for manufacturing the same and electrostatic chuck using the same'20137,651,571'Susceptor'20107,646,580'Electrostatic chuck and wafer holding member and wafer treatment method'20107,068,489'Electrostatic chuck for holding wafer'20066,643,115'Electrostatic chuck'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2013Patents assigned to KYOCERA CORP (5)· patent assignee history
2003–2006Based in Kokubu, JP· patent location history
2010–2013Based in Kirishima, JP· patent location history
2010Based in Kagoshima, JP· patent location history
2013Patents assigned to MIGITA YASUSHI (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KYOCERA CORP52003–2013
MIGITA YASUSHIself12013
Locations
LocationPatentsSpan
Kirishima, JP22010–2013
Kokubu, JP22003–2006
Kagoshima, JP12010