Inventor
Frank Loren PASQUALE
Inventor
US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material28%
H01JElectric discharge tubes or discharge lamps22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
H01LSemiconductor devices13%
F16KValves6%
F17DPipe-line systems6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
H10BElectronic memory devices3%
PatentTitleYear
12,598,930Conformal thermal CVD with controlled film properties and high deposition rate202612,421,602Multi-station semiconductor processing with independently adjustable pedestals202512,291,777Throughput improvement with interval conditioning purging202512,270,103Plasma-enhanced atomic layer deposition with radio-frequency power ramping202512,252,782In-situ PECVD cap layer202512,057,300Apparatus for cleaning plasma chambers202411,959,175Fill on demand ampoule refill202411,959,172Substrate processing systems including gas delivery system with reduced dead legs202411,661,654Substrate processing systems including gas delivery system with reduced dead legs2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to LAM RES CORP (8)· patent assignee history
2023–2026Based in US· patent location history
2026Patents assigned to LAM RES CORPORATION (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 8 | 2023–2025 |
| LAM RES CORPORATION | 1 | 2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 9 | 2023–2026 |