Inventor
Kenneth J. Newton
Inventor
McKinney, TX, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Wprimary
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1060%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
PatentTitleYear
7,727,885'Reduction of punch-thru defects in damascene processing'20107,087,518'Method of passivating and/or removing contaminants on a low-k dielectric/copper surface'20066,872,665'Process flow for dual damescene interconnect structures'20056,861,348'Pre-pattern surface modification of low-k dielectrics'20056,797,633'In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning'20046,774,031'Method of forming dual-damascene structure'20046,723,636'Methods for forming multiple damascene layers'20046,720,247'Pre-pattern surface modification for low-k dielectrics using A H2 plasma'20046,455,411'Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2010Patents assigned to TEXAS INSTRUMENTS INC (9)· patent assignee history
2002–2010Based in McKinney, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEXAS INSTRUMENTS INC | 9 | 2002–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| McKinney, Texas, US | 9 | 2002–2010 |