Inventor
JOHN STEPHEN DREWERY
Inventor
US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps21%
H01LSemiconductor devices14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
F04FPumping of fluid by direct contact of another fluid or by using inertia of fluid to be pumped11%
C23CCoating metallic material7%
F04CRotary-piston, or oscillating-piston, positive-displacement machines for liquids7%
F04DNon-positive-displacement pumps7%
F05CIndexing scheme relating to materials, material properties or material characteristics for machines, engines or pumps other than non-positive-displacement machines or engines7%
F24FAir-conditioning4%
H01QAntennas, i.e. radio aerials4%
PatentTitleYear
12,580,325Phased array antennas and methods for controlling uniformity in processing a substrate202612,573,589Synchronization of RF generators202612,406,872Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management202512,368,057Enhanced closed loop gas based heat exchange202512,087,561Vacuum pump protection against deposition byproduct buildup202412,046,450Synchronization of RF generators202411,710,623Vacuum pump protection against deposition byproduct buildup202311,676,798Cooling for a plasma-based reactor2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to LAM RES CORP (8)· patent assignee history
2023–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 8 | 2023–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 8 | 2023–2026 |