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Inventor

Lennert Schwart

Inventor
Munich, DE

Overview

1→
Patents
2021
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B25Bprimary
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
10,937,681Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to SUSS MICROTEC LITHOGRAPHY GMBH (1)· patent assignee history
2021Based in Munich, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SUSS MICROTEC LITHOGRAPHY GMBH12021
Locations
LocationPatentsSpan
Munich, DE12021