Inventor
Yu Wamura
Inventor
Iwate, JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H01LSemiconductor devices19%
H10DInorganic electric semiconductor devices6%
H01JElectric discharge tubes or discharge lamps4%
B01DSeparation2%
B05BSpraying apparatus2%
B08BCleaning in general2%
C01BNon-metallic elements2%
G05BControl or regulating systems in general2%
PatentTitleYear
10,793,432Output inspection method for ozone mass flow controller202010,472,719Nozzle and substrate processing apparatus using same201910,053,776Method of detoxifying exhaust pipe and film forming apparatus20189,929,008'Substrate processing method and substrate processing apparatus'20189,748,104'Method of depositing film'20179,435,026'Film deposition apparatus'20169,418,837'Semiconductor device manufacturing method and substrate treatment system'20169,293,543'Film forming method and film forming apparatus'20169,165,780'Plasma processing apparatus and plasma processing method'20159,103,029'Processing apparatus and film forming method'20159,080,238'Raw material supplying device and film forming apparatus'20158,992,685'Substrate processing apparatus, substrate processing method, and computer-readable storage medium'20158,896,097'Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor'20148,895,456'Method of depositing a film'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2020Patents assigned to TOKYO ELECTRON LTD (14)· patent assignee history
2014–2019Based in Iwate, JP· patent location history
2014–2020Based in Oshu, JP· patent location history
2015Patents assigned to WAMURA YU (3)· patent assignee history
2015Patents assigned to ASARI SHINJI (1)· patent assignee history
2015Patents assigned to FURUYA HARUHIKO (1)· patent assignee history
2015Patents assigned to HONMA MANABU (1)· patent assignee history
2015Based in Nirasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 14 | 2014–2020 |
| WAMURA YUself | 3 | 2015 |
| ASARI SHINJI | 1 | 2015 |
| FURUYA HARUHIKO | 1 | 2015 |
| HONMA MANABU | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Iwate, JP | 7 | 2014–2019 |
| Oshu, JP | 5 | 2014–2020 |
| Nirasaki, JP | 2 | 2015 |