Inventor
Chikako Takatou
Inventor
Sagamihara, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
5,677,011'Processing method using fast atom beam'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997Patents assigned to EBARA CORP (1)· patent assignee history
1997Based in Sagamihara, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 1 | 1997 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sagamihara, JP | 1 | 1997 |