Inventor
Hitoshi Sunaoshi
Inventor
Kanagawa, JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps43%
B82YSpecific uses or applications of nanostructures30%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
G01KMeasuring temperature3%
G21KHandling of particles or ionising radiation not otherwise provided for3%
PatentTitleYear
8,653,487'Lithography apparatus and lithography method'20148,367,276'Mask blank and method of manufacturing mask'20138,188,443'Focusing method of charged particle beam and astigmatism adjusting method of charged particle'20127,977,654'Writing apparatus and writing method'20117,923,704'Charged particle beam writing method'20117,679,068'Method of calculating deflection aberration correcting voltage and charged particle beam writing method'20107,652,271'Charged-particle beam lithography with grid matching for correction of beam shot position deviation'20107,485,879'Electron beam writing apparatus and writing method'20096,836,319'Optical system adjusting method for energy beam apparatus'20046,781,680'Optical system adjusting method for energy beam apparatus'20046,617,592'Charged particle beam system and chamber of charged particle beam system'20036,606,149'Optical system adjusting method for energy beam apparatus'20036,028,317'Charged particle beam optical element charged particle beam exposure apparatus and method of adjusting the same'20005,843,603'Method of evaluating shaped beam of charged beam writer and method of forming pattern'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2004Patents assigned to TOSHIBA KK (6)· patent assignee history
1998–2003Based in Yokohama, JP· patent location history
2003–2014Based in Kanagawa, JP· patent location history
2009–2014Patents assigned to NUFLARE TECHNOLOGY INC (8)· patent assignee history
2012–2014Patents assigned to SUNAOSHI HITOSHI (3)· patent assignee history
2013Patents assigned to ANZE HIROHITO (1)· patent assignee history
2013Patents assigned to HASHIMOTO MASAHIRO (1)· patent assignee history
2013Based in Numazu, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NUFLARE TECHNOLOGY INC | 8 | 2009–2014 |
| TOSHIBA KK | 6 | 1998–2004 |
| SUNAOSHI HITOSHIself | 3 | 2012–2014 |
| ANZE HIROHITO | 1 | 2013 |
| HASHIMOTO MASAHIRO | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kanagawa, JP | 10 | 2003–2014 |
| Yokohama, JP | 3 | 1998–2003 |
| Numazu, JP | 1 | 2013 |