Inventor
EDWARD J. AUGUSTYNIAK
Inventor
US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material50%
H01JElectric discharge tubes or discharge lamps50%
PatentTitleYear
12,308,216Mechanical suppression of parasitic plasma in substrate processing chamber202511,862,435Mechanical suppression of parasitic plasma in substrate processing chamber202411,725,282Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region202311,621,150Mechanical suppression of parasitic plasma in substrate processing chamber2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to LAM RES CORP (3)· patent assignee history
2023Patents assigned to NOVELLUS SYSTEMS INC (1)· patent assignee history
2023–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 3 | 2023–2025 |
| NOVELLUS SYSTEMS INC | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 4 | 2023–2025 |