Inventor
Travis R. Taylor
Inventor
Fremont, CA, US
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing34%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01JElectric discharge tubes or discharge lamps14%
H01LSemiconductor devices14%
B05DProcesses for applying fluent materials to surfaces, in general3%
C04BLime, magnesia3%
C23CCoating metallic material3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
PatentTitleYear
10,903,065Halogen removal module and associated systems and methods20219,953,825Symmetric RF return path liner20189,335,248'Systems and methods for quantifying particle performance in a substrate processing system'20169,076,826'Plasma confinement ring assembly for plasma processing chambers'20158,883,029'Method of making a gas distribution member for a plasma processing chamber'20148,845,856'Edge ring assembly for plasma etching chambers'20148,622,021'High lifetime consumable silicon nitride-silicon dioxide plasma processing components'20147,153,182'System and method for in situ characterization and maintenance of polishing pad smoothness in chemical mechanical polishing'20067,025,660'Assembly and method for generating a hydrodynamic air bearing'20067,004,825'Apparatus and associated method for conditioning in chemical mechanical planarization'20066,991,512'Apparatus for edge polishing uniformity control'20066,887,338'300 mm platen and belt configuration'20056,790,128'Fluid conserving platen for optimizing edge polishing'20046,769,970'Fluid venting platen for optimizing wafer polishing'20046,752,898'Method and apparatus for an air bearing platen with raised topography'20046,712,679'Platen assembly having a topographically altered platen surface'20046,666,755'Belt wiper for a chemical mechanical planarization system'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2021Patents assigned to LAM RES CORP (17)· patent assignee history
2003–2018Based in Fremont, CA, US· patent location history
2014–2015Patents assigned to TAYLOR TRAVIS R (3)· patent assignee history
2014Patents assigned to CERADYNE INC (1)· patent assignee history
2015Patents assigned to CARMAN DAVID (1)· patent assignee history
2015Patents assigned to DE LA LLERA ANTHONY (1)· patent assignee history
2021Based in Portland, OR, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 17 | 2003–2021 |
| TAYLOR TRAVIS Rself | 3 | 2014–2015 |
| CARMAN DAVID | 1 | 2015 |
| CERADYNE INC | 1 | 2014 |
| DE LA LLERA ANTHONY | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 16 | 2003–2018 |
| Portland, OR, US | 1 | 2021 |