LexDanaLexDanabeta
Inventor

Chi Yueh KAO

Inventor
TW

Overview

1→
Patents
2026
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C11Dprimary
C11DDetergent compositions25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
12,518,960Composition comprising a siloxane and an alkane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 NM or below2026

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2026Patents assigned to BASF SE (1)· patent assignee history
2026Based in TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
BASF SE12026
Locations
LocationPatentsSpan
TW12026