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Inventor

Tomonori Shin

Inventor
Koshi, JP

Overview

1→
Patents
2010
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
7,844,359'Coating and developing apparatus, operating method for same, and storage medium for the method'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2010Based in Koshi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12010
Locations
LocationPatentsSpan
Koshi, JP12010