Inventor
David E. Aspnes
Inventor
Apex, NC, US
Overview
Patents· 23 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties39%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light32%
G01BMeasuring length, thickness or similar linear dimensions9%
C30BSingle-crystal growth7%
C23CCoating metallic material5%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h105%
C23FNon-mechanical removal of metallic material from surface2%
Y10TTechnical subjects covered by former us classification2%
PatentTitleYear
7,355,708'Normal incidence rotating compensator ellipsometer'20087,173,700'Normal incidence rotating compensator ellipsometer'20076,831,743'Broadband spectroscopic rotating compensator ellipsometer'20046,650,415'Broadband spectroscopic rotating compensator ellipsometer'20036,449,043'Broadband spectroscopic rotating compensator ellipsometer'20026,411,381'Method of reducing noise generated by arc lamps in optical systems employing slits'20026,411,385'Thin film optical measurement system and method with calibrating ellipsometer'20026,320,657'Broadband spectroscopic rotating compensator ellipsometer'20016,304,326'Thin film optical measurement system and method with calibrating ellipsometer'20016,181,421'Ellipsometer and polarimeter with zero-order plate compensator'20016,134,012'Broadband spectroscopic rotating compensator ellipsometer'20005,973,787'Broadband spectroscopic rotating compensator ellipsometer'19995,900,939'Thin film optical measurement system and method with calibrating ellipsometer'19995,877,859'Broadband spectroscopic rotating compensator ellipsometer'19995,798,837'Thin film optical measurement system and method with calibrating ellipsometer'19985,277,747'Extraction of spatially varying dielectric function from ellipsometric data'19945,091,320'Ellipsometric control of material growth'19924,931,132'Optical control of deposition of crystal monolayers'19904,492,466'Cylindrical grating monochromator for synchrotron radiation'19854,380,490'Method of preparing semiconductor surfaces'19834,357,179'Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique'19824,332,833'Method for optical monitoring in materials fabrication'19823,985,447'Measurement of thin films by polarized light'1976Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1976–1983Patents assigned to BELL TELEPHONE LABOR INC (4)· patent assignee history
1976Based in Berkeley Heights, NJ, US· patent location history
1982–1994Based in Watchung, NJ, US· patent location history
1985Patents assigned to AT & T BELL LAB (1)· patent assignee history
1990–1994Patents assigned to BELL COMMUNICATIONS RES (3)· patent assignee history
1998–2007Patents assigned to THERMA WAVE INC (13)· patent assignee history
1998–2008Based in Apex, NC, US· patent location history
2008Patents assigned to KLA TENCOR CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| THERMA WAVE INC | 13 | 1998–2007 |
| BELL TELEPHONE LABOR INC | 4 | 1976–1983 |
| BELL COMMUNICATIONS RES | 3 | 1990–1994 |
| AT & T BELL LAB | 1 | 1985 |
| KLA TENCOR CORP | 1 | 2008 |
Locations
| Location | Patents | Span |
|---|---|---|
| Apex, NC, US | 15 | 1998–2008 |
| Watchung, New Jersey, US | 7 | 1982–1994 |
| Berkeley Heights, New Jersey, US | 1 | 1976 |