Inventor
Chi-Kang Peng
Inventor
Hsinchu, TW
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Bprimary
G03BApparatus or arrangements for taking photographs or for projecting or viewing them38%
B05DProcesses for applying fluent materials to surfaces, in general13%
G02BOptical elements, systems or apparatus13%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
G05DSystems for controlling or regulating non-electric variables13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
PatentTitleYear
11,048,149Lens structure and projection apparatus202110,989,991Adjustment device and projection device using the same20218,264,662'In-line particle detection for immersion lithography'20128,091,504'Method and apparatus for cleaning spin coater'20125,702,624'Compete hot plate temperature control system for hot treatment'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2021Based in Hsinchu, TW· patent location history
2012Patents assigned to PENG CHI-KANG (2)· patent assignee history
2012Patents assigned to TAIWAN SEMICONDUCTOR MFG (2)· patent assignee history
2012Patents assigned to CHEN LI-JUI (1)· patent assignee history
2012Patents assigned to GAU TSAI-SHENG (1)· patent assignee history
2021Patents assigned to CORETRONIC CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CORETRONIC CORP | 2 | 2021 |
| PENG CHI-KANGself | 2 | 2012 |
| TAIWAN SEMICONDUCTOR MFG | 2 | 2012 |
| CHEN LI-JUI | 1 | 2012 |
| GAU TSAI-SHENG | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 5 | 1997–2021 |