Inventor
Evgeny KAMENETSKIY
Inventor
US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps32%
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
G01BMeasuring length, thickness or similar linear dimensions6%
H05HPlasma technique3%
PatentTitleYear
12,435,963Apparatus and method for controlling edge ring variation202512,237,148Plasma processing assembly using pulsed-voltage and radio-frequency power202512,057,292Feedback loop for controlling a pulsed voltage waveform202411,848,176Plasma processing using pulsed-voltage and radio-frequency power202311,776,789Plasma processing assembly using pulsed-voltage and radio-frequency power202311,699,572Feedback loop for controlling a pulsed voltage waveform202311,668,553Apparatus and method for controlling edge ring variation202311,482,402Methods and apparatus for processing a substrate202211,462,389Pulsed-voltage hardware assembly for use in a plasma processing system202211,462,388Plasma processing assembly using pulsed-voltage and radio-frequency power2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to APPLIED MATERIALS INC (10)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 10 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 10 | 2022–2025 |