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Inventor

Kazuya Fukuhara

Inventor
Suginami-ku, JP

Overview

1→
Patents
2021
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,004,683Imprint apparatus, imprint method, and method of manufacturing semiconductor device2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to TOSHIBA MEMORY CORP (1)· patent assignee history
2021Based in Suginami-ku, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOSHIBA MEMORY CORP12021
Locations
LocationPatentsSpan
Suginami-ku, JP12021