Inventor
ALLARD EELCO KOOIKER
Inventor
NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps45%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices27%
H02NElectric machines not otherwise provided for27%
PatentTitleYear
12,525,900Object table comprising an electrostatic clamp202612,028,000Object table comprising an electrostatic clamp202411,908,656Stage apparatus suitable for a particle beam apparatus202411,764,030Stage apparatus suitable for electron beam inspection apparatus202311,637,512Object table comprising an electrostatic clamp2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2023–2026Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2023–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 5 | 2023–2026 |