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Inventor

YUJI SAWADA

Inventor
JP

Overview

3→
Patents
2022–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material27%
H01JElectric discharge tubes or discharge lamps27%
H01LSemiconductor devices18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
H01QAntennas, i.e. radio aerials9%
PatentTitleYear
12,368,030Deposition method and deposition apparatus202512,051,566Plasma processing apparatus202411,328,901Deposition method2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2025Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2022–2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32022–2025
Locations
LocationPatentsSpan
JP32022–2025