Inventor
Christopher R. Fairley
Inventor
San Jose, CA, US
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties50%
G02BOptical elements, systems or apparatus35%
G01RMeasuring electric variables12%
G06TImage data processing or generation, in general4%
PatentTitleYear
7,858,911'Confocal wafer inspection system and method'20107,554,655'High throughput brightfield/darkfield water inspection system using advanced optical techniques'20097,522,275'High throughput darkfield/brightfield wafer inspection system using advanced optical techniques'20097,399,950'Confocal wafer inspection method and apparatus using fly lens arrangement'20087,379,173'High throughput brightfield/darkfield wafer inspection system using advanced optical techniques'20087,259,844'High throughput darkfield/brightfield wafer inspection system using advanced optical techniques'20077,164,475'High throughput brightfield/darkfield wafer inspection system using advanced optical techniques'20077,109,458'Confocal wafer depth scanning inspection method'20066,867,406'Confocal wafer inspection method and apparatus using fly lens arrangement'20056,816,249'High throughput brightfield/darkfield wafer inspection system using advanced optical techniques'20046,288,780'High throughput brightfield/darkfield wafer inspection system using advanced optical techniques'20015,963,314'Laser imaging system for inspection and analysis of sub-micron particles'19995,783,814'Method and apparatus for automatically focusing a microscope'19985,672,861'Method and apparatus for automatic focusing of a confocal laser microscope'19975,557,113'Method and structure for generating a surface image of a three dimensional target'19965,479,252'Laser imaging system for inspection and analysis of sub-micron particles'19955,019,786'Phase measurement system using a dithered clock'1991Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1991Patents assigned to US ENERGY (1)· patent assignee history
1991–2010Based in San Jose, CA, US· patent location history
1995–1999Patents assigned to ULTRAPOINTE CORP (5)· patent assignee history
2001–2007Patents assigned to KLA TENCOR TECH CORP (2)· patent assignee history
2004–2010Patents assigned to KLA TENCOR CORP (9)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 9 | 2004–2010 |
| ULTRAPOINTE CORP | 5 | 1995–1999 |
| KLA TENCOR TECH CORP | 2 | 2001–2007 |
| US ENERGY | 1 | 1991 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 17 | 1991–2010 |