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Inventor

Tzung-Shiun Liu

Inventor
Tainan, TW

Overview

3→
Patents
2017–2020
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
10,802,395Lithographic mask, a pellicle therein and method of forming the same202010,698,313Apparatus and method for developing a photoresist coated substrate20209,829,786PSM blank for enhancing small size CD resolution2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (3)· patent assignee history
2017–2020Based in Tainan, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD32017–2020
Locations
LocationPatentsSpan
Tainan, TW32017–2020