Inventor

Satyadev R. Patel

Inventor

Sunnyvale, CA, US

Overview

2001–2016

Patent span

Performing operations

Primary field (CPC B)

Patents· 81 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary

G02BOptical elements, systems or apparatus32%

B82YSpecific uses or applications of nanostructures15%

B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems14%

B81BMicrostructural devices or systems, e.g. micromechanical devices11%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%

H04NPictorial communication, e.g. television5%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests3%

Y10TTechnical subjects covered by former us classification3%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h103%

C03CChemical composition of glasses, glazes or vitreous enamels1%

PatentTitleYear

9,261,696'Micromirror array assembly'2016 8,693,082'Micromirror array assembly with in-array pillars'2014 7,866,036'Method of fabricating micromirror device'2011 7,787,170'Micromirror array assembly with in-array pillars'2010 7,751,114'System and apparatus for repairing micromirrors in spatial light modulators'2010 7,697,193'Micromirror and post arrangements on substrates'2010 7,671,428'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2010 7,655,492'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2010 7,630,085'Interferometers of high resolutions'2009 7,629,190'Method for making a micromechanical device by using a sacrificial substrate'2009 7,586,668'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2009 7,573,111'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2009 7,557,932'Characterization of micromirror array devices using interferometers'2009 7,514,012'Pre-oxidization of deformable elements of microstructures'2009 7,498,648'Mirror-based projection system with a programmable control unit for controlling a spatial light modulator'2009 7,483,126'Performance analyses of micromirror devices'2009 7,483,198'Micromirror device and method for making the same'2009 7,459,333'Method for making a micromirror-based projection system with a programmable control unit for controlling a spatial light modulator'2008 7,459,402'Protection layers in micromirror array devices'2008 7,449,358'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2008 7,436,573'Electrical connections in microelectromechanical devices'2008 7,436,572'Micromirrors and hinge structures for micromirror arrays in projection displays'2008 7,422,920'Method and forming a micromirror array device with a small pitch size'2008 7,411,717'Micromirror device'2008 7,405,860'Spatial light modulators with light blocking/absorbing areas'2008 7,394,140'Micromirror array device with electrostatically deflectable mirror plates'2008 7,375,873'Method of repairing micromirrors in spatial light modulators'2008 7,362,493'Micromirror and post arrangements on substrates'2008 7,362,494'Micromirror devices and methods of making the same'2008 7,312,915'Microelectromechanical devices with low inertia movable elements'2007 7,295,363'Optical coating on light transmissive substrates of micromirror devices'2007 7,286,278'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2007 7,268,934'Micromirror and post arrangements on substrates'2007 7,215,459'Micromirror devices with in-plane deformable hinge'2007 7,215,458'Deflection mechanisms in micromirror devices'2007 7,198,982'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2007 7,189,332'Apparatus and method for detecting an endpoint in a vapor phase etch'2007 7,158,279'Spatial light modulators with non-uniform pixels'2007 7,153,443'Microelectromechanical structure and a method for making the same'2006 7,138,693'Barrier layers for microelectromechanical systems'2006 7,119,944'Micromirror device and method for making the same'2006 7,113,322'Micromirror having offset addressing electrode'2006 7,110,160'Electrical contacts in microelectromechanical devices with multiple substrates'2006 7,099,065'Micromirrors with OFF-angle electrodes and stops'2006 7,085,035'Display apparatus with improved contrast ratio'2006 7,075,702'Micromirror and post arrangements on substrates'2006 7,042,622'Micromirror and post arrangements on substrates'2006 7,042,623'Light blocking layers in MEMS packages'2006 7,041,224'Method for vapor phase etching of silicon'2006 7,027,200'Etching method used in fabrications of microstructures'2006 7,019,880'Micromirrors and hinge structures for micromirror arrays in projection displays'2006 7,019,376'Micromirror array device with a small pitch size'2006 7,002,726'Micromirror having reduced space between hinge and mirror plate of the micromirror'2006 6,995,034'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2006 6,995,040'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2006 6,985,277'Micromirror array having reduced gap between adjacent micromirrors of the micromirror array'2006 6,980,347'Micromirror having reduced space between hinge and mirror plate of the micromirror'2005 6,980,349'Micromirrors with novel mirror plates'2005 6,972,891'Micromirror having reduced space between hinge and mirror plate of the micromirror'2005 6,970,281'Micromirror array having reduced gap between adjacent micromirrors of the micromirror array'2005 6,969,635'Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates'2005 6,970,280'High angle micro-mirrors and processes'2005 6,965,468'Micromirror array having reduced gap between adjacent micromirrors of the micromirror array'2005 6,960,305'Methods for forming and releasing microelectromechanical structures'2005 6,952,302'Hinge structures for micro-mirror arrays'2005 6,949,202'Apparatus and method for flow of process gas in an ultra-clean environment'2005 6,950,223'Multiple hinge MEMS device'2005 6,942,811'Method for achieving improved selectivity in an etching process'2005 6,913,942'Sacrificial layers for use in fabrications of microelectromechanical devices'2005 6,906,847'Spatial light modulators with light blocking/absorbing areas'2005 6,900,072'Method for making a micromechanical device by using a sacrificial substrate'2005 6,885,494'High angle micro-mirrors and processes'2005 6,873,450'Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields'2005 6,867,897'Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays'2005 6,849,471'Barrier layers for microelectromechanical systems'2005 6,844,959'Spatial light modulators with light absorbing areas'2005 6,804,039'Multilayer hinge structures for micro-mirror arrays in projection displays'2004 6,800,210'Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants'2004 6,741,383'Deflectable micromirrors with stopping mechanisms'2004 6,523,961'Projection system and mirror elements for improved contrast ratio in spatial light modulators'2003 6,290,864'Fluoride gas etching of silicon with improved selectivity'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2007Patents assigned to REFLECTIVITY INC (42)· patent assignee history

2001–2016Based in Sunnyvale, CA, US· patent location history

2003–2008Based in Elk Grove, CA, US· patent location history

2006–2016Patents assigned to TEXAS INSTRUMENTS INC (38)· patent assignee history

2006–2011Based in Palo Alto, CA, US· patent location history

2014Patents assigned to DEHLINGER DIETRICH (1)· patent assignee history

2014Patents assigned to HUIBERS ANDREW G (1)· patent assignee history

2014Patents assigned to PATEL SATYADEV (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
REFLECTIVITY INC	42	2001–2007
TEXAS INSTRUMENTS INC	38	2006–2016
DEHLINGER DIETRICH	1	2014
HUIBERS ANDREW G	1	2014
PATEL SATYADEVself	1	2014

Locations

Location	Patents	Span
Sunnyvale, California, US	53	2001–2016
Elk Grove, California, US	19	2003–2008
Palo Alto, California, US	9	2006–2011