Inventor
KOHEI SENSHU
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding20%
G01MTesting static or dynamic balance of machines or structures20%
G06TImage data processing or generation, in general10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
PatentTitleYear
12,566,373Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article202612,386,276Detection device, detection method, lithography apparatus, and article manufacturing method202512,092,955Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article202412,092,954Imprint apparatus, imprint method, and article manufacturing method2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2026Patents assigned to CANON KK (4)· patent assignee history
2024–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 4 | 2024–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2024–2026 |