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Inventor

Hironobu Hyakutake

Inventor
Kumamoto, JP

Overview

13→
Patents
2001–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 13 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
H01LSemiconductor devices27%
B08BCleaning in general10%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
B01DSeparation3%
C23CCoating metallic material3%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests3%
Y10TTechnical subjects covered by former us classification3%
PatentTitleYear
11,087,992Substrate processing method and substrate processing apparatus202111,075,096Substrate processing apparatus202110,928,732Substrate liquid processing apparatus, substrate liquid processing method, and storage medium202110,916,456Substrate liquid processing apparatus and substrate liquid processing method202110,840,081Liquid processing apparatus, liquid processing method, and storage medium202010,458,010Substrate liquid processing apparatus, substrate liquid processing method, and storage medium20199,027,573'Substrate processing apparatus for maintaining a more uniform temperature during substrate processing'20158,882,961'Substrate treatment apparatus'20148,778,092'Substrate processing apparatus, substrate processing method and storage medium'20148,685,169'Substrate processing apparatus, substrate processing method and storage medium'20148,577,502'Liquid processing apparatus, liquid processing method, computer program, and storage medium'20136,293,288'Cleaning method and apparatus'20016,203,627'Cleaning method'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2021Patents assigned to TOKYO ELECTRON LTD (13)· patent assignee history
2001–2013Based in Tosu, JP· patent location history
2013–2015Patents assigned to HYAKUTAKE HIRONOBU (5)· patent assignee history
2013–2014Patents assigned to TANAKA HIROSHI (2)· patent assignee history
2013Patents assigned to KAMIKAWA YUJI (1)· patent assignee history
2014Patents assigned to KAMITOMO SHINGO (1)· patent assignee history
2014–2021Based in Kumamoto, JP· patent location history
2014–2021Based in Koshi, JP· patent location history
2021Based in Kumamoto-shi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD132001–2021
HYAKUTAKE HIRONOBUself52013–2015
TANAKA HIROSHI22013–2014
KAMIKAWA YUJI12013
KAMITOMO SHINGO12014
Locations
LocationPatentsSpan
Kumamoto, JP52014–2021
Koshi, JP42014–2021
Tosu, JP32001–2013
Kumamoto-shi, JP12021