Inventor
Subramanian Balakumar
Inventor
Singapore, SG
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H10DInorganic electric semiconductor devices20%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1020%
PatentTitleYear
7,095,073'High K artificial lattices for capacitor applications to use in Cu or Al BEOL'20066,830,971'High K artificial lattices for capacitor applications to use in CU or AL BEOL'20046,726,545'Linear polishing for improving substrate uniformity'20046,663,472'Multiple step CMP polishing'20036,649,486'Method to form shallow trench isolations'20036,569,770'Method for improving oxide erosion of tungsten CMP operations'20036,248,006'CMP uniformity'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2006Patents assigned to CHARTERED SEMICONDUCTOR MFG (7)· patent assignee history
2001–2006Based in Singapore, SG· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CHARTERED SEMICONDUCTOR MFG | 7 | 2001–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Singapore, SG | 7 | 2001–2006 |