Inventor
Hans-Jochen Paul
Inventor
Aalen, DE
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G02Bprimary
G02BOptical elements, systems or apparatus43%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G21KHandling of particles or ionising radiation not otherwise provided for11%
B82YSpecific uses or applications of nanostructures7%
C23CCoating metallic material7%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light7%
PatentTitleYear
10,474,036Optical element and optical arrangement therewith20199,915,876'EUV mirror and optical system comprising EUV mirror'20189,915,873'Reflective optical element, and optical system of a microlithographic projection exposure apparatus'20189,494,718'Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective'20169,188,771'Reflective optical imaging system'20158,294,991'Interference systems for microlithgraphic projection exposure systems'20127,196,842'Attenuating filter for ultraviolet light'20077,093,937'Optical component and coating system for coating substrates for optical components'20066,967,771'Antireflection coating for ultraviolet light at large angles of incidence'20056,863,398'Method and coating system for coating substrates for optical components'20056,836,379'Catadioptric objective'20046,825,976'Antireflection coating for ultraviolet light'20046,697,194'Antireflection coating for ultraviolet light at large angles of incidence'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2007Patents assigned to ZEISS CARL SMT AG (7)· patent assignee history
2004–2019Based in Aalen, DE· patent location history
2012–2019Patents assigned to ZEISS CARL SMT GMBH (6)· patent assignee history
2012–2016Patents assigned to PAUL HANS-JOCHEN (3)· patent assignee history
2015–2016Patents assigned to BRAUN GERHARD (2)· patent assignee history
2015–2016Patents assigned to DODOC AURELIAN (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT AG | 7 | 2004–2007 |
| ZEISS CARL SMT GMBH | 6 | 2012–2019 |
| PAUL HANS-JOCHENself | 3 | 2012–2016 |
| BRAUN GERHARD | 2 | 2015–2016 |
| DODOC AURELIAN | 2 | 2015–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 13 | 2004–2019 |