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Inventor

Hsu-en Yang

Inventor
San Jose, CA, US

Overview

1→
Patents
2009
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h10100%
PatentTitleYear
7,531,102'Simultaneous selective polymer deposition and etch pitch doubling for sub 50nm line/space patterning'2009

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2009Patents assigned to INTEL CORP (1)· patent assignee history
2009Based in San Jose, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
INTEL CORP12009
Locations
LocationPatentsSpan
San Jose, California, US12009