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Inventor

Atsuhiko Kato

Inventor
Isehara, JP

Overview

3→
Patents
1989–2010
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Cprimary
G01CMeasuring distances, levels or bearings40%
G05DSystems for controlling or regulating non-electric variables40%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
PatentTitleYear
7,679,069'Method and system for optimizing alignment performance in a fleet of exposure tools'20104,924,153'Apparatus for guiding movement of an unmanned moving body'19904,862,047'Apparatus for guiding movement of an unmanned moving body'1989

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1989–1990Patents assigned to KOMATSU MFG CO LTD (2)· patent assignee history
1989–1990Based in Isehara, JP· patent location history
2010Patents assigned to KLA TENCOR TECH CORP (1)· patent assignee history
2010Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KOMATSU MFG CO LTD21989–1990
KLA TENCOR TECH CORP12010
Locations
LocationPatentsSpan
Isehara, JP21989–1990
Tokyo, JP12010