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Inventor

Robert J. Kolenkow

Inventor
Berkeley, CA, US

Overview

3→
Patents
1993–1999
Patent span
Chemistry
Primary field (CPC C)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material40%
H01JElectric discharge tubes or discharge lamps40%
B24BMachines, devices, or processes for grinding or polishing20%
PatentTitleYear
5,873,989'Methods and apparatus for linear scan magnetron sputtering'19995,830,327'Methods and apparatus for sputtering with rotating magnet sputter sources'19985,205,082'Wafer polisher head having floating retainer ring'1993

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1993Patents assigned to CYBEQ SYST INC (1)· patent assignee history
1993–1999Based in Berkeley, CA, US· patent location history
1998–1999Patents assigned to INTEVAC INC (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
INTEVAC INC21998–1999
CYBEQ SYST INC11993
Locations
LocationPatentsSpan
Berkeley, California, US31993–1999