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Inventor

Rick J. Roberts

Inventor
San Jose, CA, US

Overview

17→
Patents
2004–2013
Patent span
Physics
Primary field (CPC G)

Patents· 17 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them9%
G03DApparatus for processing exposed photographic materials9%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices9%
G05BControl or regulating systems in general9%
Y02PClimate change mitigation technologies in the production or processing of goods9%
Y10TTechnical subjects covered by former us classification9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
B05DProcesses for applying fluent materials to surfaces, in general2%
PatentTitleYear
8,550,031'Cluster tool architecture for processing a substrate'20138,215,262'Cluster tool architecture for processing a substrate'20128,181,596'Cluster tool architecture for processing a substrate'20128,146,530'Cluster tool architecture for processing a substrate'20127,925,377'Cluster tool architecture for processing a substrate'20117,743,728'Cluster tool architecture for processing a substrate'20107,694,647'Cluster tool architecture for processing a substrate'20107,431,585'Apparatus and method for heating substrates'20087,381,052'Apparatus and method for heating substrates'20087,357,842'Cluster tool architecture for processing a substrate'20087,256,139'Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices'20077,166,524'Method for ion implanting insulator material to reduce dielectric constant'20076,992,024'Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques'20066,936,551'Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices'20056,895,776'Anti-stratification-solution delivery system for spin-on dielectrics'20056,878,644'Multistep cure technique for spin-on-glass films'20056,693,050'Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques'2004

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2004–2013Patents assigned to APPLIED MATERIALS INC (16)· patent assignee history
2004–2008Based in Sunnyvale, CA, US· patent location history
2007–2013Based in San Jose, CA, US· patent location history
2012–2013Patents assigned to ARMER HELEN R (4)· patent assignee history
2012–2013Patents assigned to BACKER JOHN A (4)· patent assignee history
2012–2013Patents assigned to CARLSON CHARLES (4)· patent assignee history
2012–2013Patents assigned to HERCHEN HARALD (4)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC162004–2013
ARMER HELEN R42012–2013
BACKER JOHN A42012–2013
CARLSON CHARLES42012–2013
HERCHEN HARALD42012–2013
Locations
LocationPatentsSpan
San Jose, California, US92007–2013
Sunnyvale, California, US82004–2008