Inventor
Junya Minamida
Inventor
Koshi, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1044%
H01LSemiconductor devices28%
B08BCleaning in general8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
G03DApparatus for processing exposed photographic materials4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
Y10TTechnical subjects covered by former us classification4%
PatentTitleYear
10,373,849Substrate processing apparatus201910,186,433Substrate processing apparatus201910,128,132Substrate liquid processing apparatus201810,056,269Substrate liquid processing apparatus20189,842,747'Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method'20179,666,463'Substrate processing apparatus'20178,978,670'Substrate processing apparatus'20158,662,811'Substrate processing apparatus'20148,033,244'Substrate processing system'20117,918,242'Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program'20117,485,188'Coating process method and coating process apparatus'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2019Patents assigned to TOKYO ELECTRON LTD (11)· patent assignee history
2009–2019Based in Kumamoto, JP· patent location history
2011–2019Based in Koshi, JP· patent location history
2014–2015Patents assigned to MINAMIDA JUNYA (2)· patent assignee history
2014–2015Patents assigned to UEDA ISSEI (2)· patent assignee history
2015Patents assigned to CHOUNO YASUHIRO (1)· patent assignee history
2015Patents assigned to ESHIMA KAZUYOSHI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 11 | 2009–2019 |
| MINAMIDA JUNYAself | 2 | 2014–2015 |
| UEDA ISSEI | 2 | 2014–2015 |
| CHOUNO YASUHIRO | 1 | 2015 |
| ESHIMA KAZUYOSHI | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 7 | 2011–2019 |
| Kumamoto, JP | 4 | 2009–2019 |