Inventor
Arkadiy Shimanovich
Inventor
San Francisco, CA, US
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices17%
H01JElectric discharge tubes or discharge lamps17%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%
PatentTitleYear
7,105,061'Method and apparatus for sealing substrate load port in a high pressure reactor'20066,563,092'Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometry'20036,333,268'Method and apparatus for removing post-etch residues and other adherent matrices'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2006Patents assigned to NOVELLUS SYSTEMS INC (3)· patent assignee history
2001–2006Based in San Francisco, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVELLUS SYSTEMS INC | 3 | 2001–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Francisco, California, US | 3 | 2001–2006 |