Inventor
Shumichi Uzawa
Inventor
Tokyo, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
5,377,251'Exposure apparatus'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994Patents assigned to CANON KK (1)· patent assignee history
1994Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 1 | 1994 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 1 | 1994 |