Inventor
Prerna Sonthalia Goradia
Inventor
Mumbai, IN
Overview
Patents· 18 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
C23CCoating metallic material11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
C23FNon-mechanical removal of metallic material from surface6%
C25DProcesses for the electrolytic or electrophoretic production of coatings5%
H01JElectric discharge tubes or discharge lamps3%
B24BMachines, devices, or processes for grinding or polishing2%
C09GPolishing compositions2%
C09KMaterials for miscellaneous applications, not provided for elsewhere2%
PatentTitleYear
10,573,527Gas-phase selective etching systems and methods202010,515,927Methods and apparatus for semiconductor package processing201910,497,573Selective atomic layer etching of semiconductor materials201910,407,789Uniform crack-free aluminum deposition by two step aluminum electroplating process201910,319,601Slurry for polishing of integrated circuit packaging201910,280,507Flowable gapfill using solvents201910,273,577Low vapor pressure aerosol-assisted CVD201910,253,406Method for forming yttrium oxide on semiconductor processing equipment201910,233,554Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment201910,177,002Methods for chemical etching of silicon201910,163,629Low vapor pressure aerosol-assisted CVD201810,074,559Selective poreseal deposition prevention and residue removal using SAM201810,043,684Self-limiting atomic thermal etching systems and methods201810,017,856Flowable gapfill using solvents20189,991,129Selective etching of amorphous silicon over epitaxial silicon20189,903,020'Generation of compact alumina passivation layers on aluminum plasma equipment components'20189,780,250'Self-aligned mask for ion implantation'20179,673,042'Methods and apparatus for in-situ cleaning of copper surfaces and deposition and removal of self-assembled monolayers'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Patents assigned to APPLIED MATERIALS INC (17)· patent assignee history
2017Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (1)· patent assignee history
2017–2020Based in Mumbai, IN· patent location history
2017–2019Based in Maharashtra, IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 17 | 2017–2020 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Mumbai, IN | 16 | 2017–2020 |
| Maharashtra, IN | 2 | 2017–2019 |