Inventor
Fan Zhi
Inventor
Beijing, CN
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
G01BMeasuring length, thickness or similar linear dimensions20%
G01DMeasuring not specially adapted for a specific variable20%
PatentTitleYear
9,995,569Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage20189,904,183'Coarse motion and fine motion integrated reticle stage driven by planar motor'20189,791,789'Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2018Patents assigned to UNIV TSINGHUA (3)· patent assignee history
2017Patents assigned to BEIJING U-PRECISION TECH CO LTD (1)· patent assignee history
2017–2018Based in Beijing, CN· patent location history
2018Patents assigned to BEIJING U PREC TECH CO LTD (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV TSINGHUA | 3 | 2017–2018 |
| BEIJING U PREC TECH CO LTD | 2 | 2018 |
| BEIJING U-PRECISION TECH CO LTD | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Beijing, CN | 3 | 2017–2018 |