Inventor
Ayuta Suzuki
Inventor
Nirasaki, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices22%
C23CCoating metallic material19%
H01JElectric discharge tubes or discharge lamps11%
B29CShaping or joining of plastics7%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
G05DSystems for controlling or regulating non-electric variables4%
H10DInorganic electric semiconductor devices4%
PatentTitleYear
10,847,348Plasma processing apparatus and plasma processing method202010,734,221Method of manufacturing semiconductor device and method of forming metal oxide film202010,643,839Film forming apparatus and film forming method202010,121,680Substrate processing apparatus20189,441,292'Etching method, etching apparatus, and ring member'20169,202,731'Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein'20158,945,413'Etching method, etching apparatus, and ring member'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2020Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2015Patents assigned to SUZUKI AYUTA (2)· patent assignee history
2015Patents assigned to KANG SONGYUN (1)· patent assignee history
2015Patents assigned to KASAI SHIGERU (1)· patent assignee history
2015Patents assigned to MORIYA TSUYOSHI (1)· patent assignee history
2015–2020Based in Nirasaki, JP· patent location history
2020Based in Yamanashi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2015–2020 |
| SUZUKI AYUTAself | 2 | 2015 |
| KANG SONGYUN | 1 | 2015 |
| KASAI SHIGERU | 1 | 2015 |
| MORIYA TSUYOSHI | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 6 | 2015–2020 |
| Yamanashi, JP | 1 | 2020 |