Inventor
KAZUYOSHI SHINOHARA
Inventor
JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general27%
H01LSemiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
F26BDrying solid materials or objects by removing liquid therefrom12%
B01DSeparation4%
C11DDetergent compositions4%
PatentTitleYear
12,588,461Substrate processing method and substrate processing apparatus202612,532,693Substrate processing apparatus and substrate processing method202612,027,394Substrate processing method and substrate processing apparatus202411,769,661Substrate processing method and substrate processing apparatus202311,676,835Substrate processing method and substrate processing apparatus202311,569,086Substrate processing apparatus and substrate processing method202311,551,935Substrate processing method and substrate processing apparatus2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2023–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2023–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 7 | 2023–2026 |