Inventor
Kartik Santhanam
Inventor
Fremont, CA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1045%
H01JElectric discharge tubes or discharge lamps36%
H01LSemiconductor devices9%
H10DInorganic electric semiconductor devices9%
PatentTitleYear
8,927,400'Safe handling of low energy, high dose arsenic, phosphorus, and boron implanted wafers'20158,501,605'Methods and apparatus for conformal doping'20138,003,500'Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking'20117,989,329'Removal of surface dopants from a substrate'20117,968,401'Reducing photoresist layer degradation in plasma immersion ion implantation'20117,723,219'Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition'20107,659,184'Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2015Patents assigned to APPLIED MATERIALS INC (7)· patent assignee history
2010–2011Based in Fremont, CA, US· patent location history
2013Patents assigned to HILKENE MARTIN A (1)· patent assignee history
2013Patents assigned to LEE MARK R (1)· patent assignee history
2013Patents assigned to PORSHNEV PETER I (1)· patent assignee history
2013Patents assigned to SANTHANAM KARTIK (1)· patent assignee history
2013–2015Based in Milpitas, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 7 | 2010–2015 |
| HILKENE MARTIN A | 1 | 2013 |
| LEE MARK R | 1 | 2013 |
| PORSHNEV PETER I | 1 | 2013 |
| SANTHANAM KARTIKself | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 5 | 2010–2011 |
| Milpitas, California, US | 2 | 2013–2015 |