Inventor

Makoto Ezumi

Inventor

Mito, JP

Overview

1997–2016

Patent span

Electricity

Primary field (CPC H)

Patents· 55 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary

H01JElectric discharge tubes or discharge lamps68%

G01NInvestigating or analysing materials by determining their chemical or physical properties16%

G06TImage data processing or generation, in general7%

G01RMeasuring electric variables5%

G01BMeasuring length, thickness or similar linear dimensions2%

G02BOptical elements, systems or apparatus1%

PatentTitleYear

9,230,775'Charged particle instrument'2016 8,835,844'Sample electrification measurement method and charged particle beam apparatus'2014 8,698,080'Scanning electron microscope'2014 8,686,380'Charged particle beam apparatus'2014 8,481,934'Method for inspecting and measuring sample and scanning electron microscope'2013 8,338,781'Charged particle beam scanning method and charged particle beam apparatus'2012 8,080,789'Sample dimension measuring method and scanning electron microscope'2011 8,067,733'Scanning electron microscope having a monochromator'2011 7,977,632'Scanning electron microscope'2011 7,960,696'Method for inspecting and measuring sample and scanning electron microscope'2011 7,935,925'Charged particle beam scanning method and charged particle beam apparatus'2011 7,838,827'Monochromator and scanning electron microscope using the same'2010 7,718,976'Charged particle beam apparatus'2010 7,714,286'Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor'2010 7,700,918'Sample electrification measurement method and charged particle beam apparatus'2010 7,659,508'Method for measuring dimensions of sample and scanning electron microscope'2010 7,642,514'Charged particle beam apparatus'2010 7,612,336'Scanning electron microscope having a monochromator'2009 7,605,381'Charged particle beam alignment method and charged particle beam apparatus'2009 7,566,872'Scanning electron microscope'2009 7,459,681'Scanning electron microscope'2008 7,442,923'Scanning electron microscope'2008 7,408,172'Charged particle beam apparatus and charged particle beam irradiation method'2008 7,399,966'Scanning electron microscope'2008 7,372,028'Sample electrification measurement method and charged particle beam apparatus'2008 7,355,174'Charged particle beam emitting device and method for adjusting the optical axis'2008 7,329,868'Charged particle beam apparatus'2008 7,315,024'Monochromator and scanning electron microscope using the same'2008 7,294,835'Scanning electron microscope'2007 7,282,722'Charged particle beam apparatus and charged particle beam irradiation method'2007 7,109,485'Charged particle beam apparatus'2006 7,087,899'Sample electrification measurement method and charged particle beam apparatus'2006 7,075,078'Scanning electron microscope'2006 7,049,591'Scanning electron microscope'2006 7,022,983'Monochromator and scanning electron microscope using the same'2006 6,956,211'Charged particle beam apparatus and charged particle beam irradiation method'2005 6,946,656'Sample electrification measurement method and charged particle beam apparatus'2005 6,936,818'Charged particle beam apparatus'2005 6,885,001'Scanning electron microscope'2005 6,872,944'Scanning electron microscope'2005 6,864,493'Charged particle beam alignment method and charged particle beam apparatus'2005 6,847,038'Scanning electron microscope'2005 6,787,772'Scanning electron microscope'2004 6,667,476'Scanning electron microscope'2003 6,653,633'Charged particle beam apparatus'2003 6,646,262'Scanning electron microscope'2003 6,635,873'Scanning electron microscope with voltage applied to the sample'2003 6,538,249'Image-formation apparatus using charged particle beams under various focus conditions'2003 6,512,228'Scanning electron microscope'2003 6,444,981'Scanning electron microscope'2002 6,084,238'Scanning electron microscope'2000 6,069,356'Scanning electron microscope'2000 5,900,629'Scanning electron microscope'1999 5,872,358'Scanning electron microscope'1999 5,608,218'Scanning electron microscope'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–2014Patents assigned to HITACHI LTD (35)· patent assignee history

1997Based in Katsuta, JP· patent location history

1999–2016Based in Mito, JP· patent location history

2005–2016Patents assigned to HITACHI HIGH TECH CORP (20)· patent assignee history

2011–2016Patents assigned to EZUMI MAKOTO (8)· patent assignee history

2011–2014Patents assigned to OSE YOICHI (3)· patent assignee history

2011–2014Patents assigned to FUKAYA RITSUO (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
HITACHI LTD	35	1997–2014
HITACHI HIGH TECH CORP	20	2005–2016
EZUMI MAKOTOself	8	2011–2016
OSE YOICHI	3	2011–2014
FUKAYA RITSUO	2	2011–2014

Locations

Location	Patents	Span
Mito, JP	54	1999–2016
Katsuta, JP	1	1997